The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2009
Filed:
Nov. 17, 2006
Applicant:
Masaru Suzuki, Nirasaki, JP;
Inventor:
Masaru Suzuki, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25B 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is provided a method for unloading an object vacuum-chucked on a mounting table having one or more gas flow paths opened at one or more locations on the mounting table, including the steps of (a) turning off a vacuum-chucking of the object vacuum-chucked via the gas flow paths; (b) lifting the object from the mounting table by using an object lifting unit; and (C) supplying a gas between the mounting table and the object during the step (b) via at least one of the gas flow paths. Further, there is also provided a program storage medium storing therein a computer executable program for executing the unloading method.