The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2009
Filed:
Oct. 18, 2004
Krishnamurthy Bhaskar, San Jose, CA (US);
Mark J. Roulo, Mountain View, CA (US);
John S. Taylor, San Jose, CA (US);
Lawrence R. Miller, Los Altos, CA (US);
Paul T. Russell, Scotts Valley, CA (US);
Jason Z. Lin, Saratoga, CA (US);
Eliezer Rosengaus, Palo Alto, CA (US);
Richard M. Wallingford, San Jose, CA (US);
Kishore Bubna, Fremont, CA (US);
Krishnamurthy Bhaskar, San Jose, CA (US);
Mark J. Roulo, Mountain View, CA (US);
John S. Taylor, San Jose, CA (US);
Lawrence R. Miller, Los Altos, CA (US);
Paul T. Russell, Scotts Valley, CA (US);
Jason Z. Lin, Saratoga, CA (US);
Eliezer Rosengaus, Palo Alto, CA (US);
Richard M. Wallingford, San Jose, CA (US);
Kishore Bubna, Fremont, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
An inspection system. The inspection system has a sensor for generating data. A first network is coupled to the sensor and communicates the data. An array of nodes is coupled to the first network, and processes the data to produce reports. Each node has an interface coupled to the first network, and formats the data according to protocol. A bus is coupled to the interface A computer is coupled to the bus, and process the data according to an algorithm, to produce the report. The array of nodes is coupled to the first network in a daisy chain topology, and each node within a column of nodes receives common data with other nodes within the column. A second network is coupled to the nodes the second network, and receives the anomaly reports from the nodes and sends information to the nodes to coordinate processing of the data.