The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2009
Filed:
Sep. 28, 2006
Steven C. Shannon, San Mateo, CA (US);
Daniel J. Hoffman, Saratoga, CA (US);
Steven Lane, San Jose, CA (US);
Walter R. Merry, Sunnyvale, CA (US);
Jivko Dinev, Cupertino, CA (US);
Steven C. Shannon, San Mateo, CA (US);
Daniel J. Hoffman, Saratoga, CA (US);
Steven Lane, San Jose, CA (US);
Walter R. Merry, Sunnyvale, CA (US);
Jivko Dinev, Cupertino, CA (US);
Applied Marterials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of a method of calculating the equivalent series resistance of a matching network using variable impedance analysis and matching networks analyzed using the same are provided herein. In one embodiment, a method of calculating the equivalent series resistance of a matching network includes the steps of connecting the matching network to a load; measuring an output of the matching network over a range of load impedances; and calculating the equivalent series resistance of the matching network based upon a relationship between the measured output and the load resistance. The load may be a surrogate load or may be a plasma formed in a process chamber.