The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2009
Filed:
Oct. 28, 2005
Eiji Fukatsu, Kyoto, JP;
Hiroyuki Yashiki, Kyoto, JP;
Hideki Adachi, Kyoto, JP;
Katsuhiko Miya, Kyoto, JP;
Eiji Fukatsu, Kyoto, JP;
Hiroyuki Yashiki, Kyoto, JP;
Hideki Adachi, Kyoto, JP;
Katsuhiko Miya, Kyoto, JP;
Abstract
A substrate W rotates about the center of rotations Aof a spin base, while supported by plural support pinsin such a manner that the substrate W can freely slide and while held owing to the force of friction which develops between the bottom surface of the substrate W and the support pins. After a detection sensordetects, while the substrate W rotates, an edge surface position (eccentric position) of the edge surface of the substrate which is the farthest from the center of rotations A, a press blockpushes this edge surface position to a preset position Pwhich is away along the horizontal direction from the center of rotations Aby a distance which is determined in accordance with the radius of the substrate W. This aligns the eccentric position to the preset position Pand positions the center Wof the substrate within a predetermined range from the center of rotations A