The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2009
Filed:
Dec. 08, 2005
Shohei Terada, Hitachi, JP;
Kazutoshi Kaji, Hitachi, JP;
Tatsumi Hirano, Hitachinaka, JP;
Gyeong-su Park, Gyeonggi-do, KR;
Se-ahn Song, Seoul, KR;
Jong-bong Park, Gyeonggi-do, KR;
Shohei Terada, Hitachi, JP;
Kazutoshi Kaji, Hitachi, JP;
Tatsumi Hirano, Hitachinaka, JP;
Gyeong-su Park, Gyeonggi-do, KR;
Se-ahn Song, Seoul, KR;
Jong-bong Park, Gyeonggi-do, KR;
Hitachi, Ltd., Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Samsung Electronics Co., Suwon, KR;
Abstract
A method for evaluating thin films comprises the steps of inputting measurement conditions, generating electron beams from an electron source to condense the electron beams to a specimen by a condenser lens, enlarging the electron beams transmitted by the specimen with imaging lenses to image an enlarged image of the specimen, acquiring elemental maps of the specimen with an element analyzer to display the acquired elemental maps, measuring a length of the elemental maps, and correcting the measurement conditions. Disclosed is an evaluating apparatus that implements the above evaluating method.