The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2009
Filed:
Dec. 17, 2004
Remco Marcel Van Dijk, Eindhoven, NL;
Donis George Flagello, Scottsdale, AZ (US);
Michel Fransois Hubert Klaassen, Eindhoven, NL;
Tammo Uitterdijk, De Bilt, NL;
Remco Marcel Van Dijk, Eindhoven, NL;
Donis George Flagello, Scottsdale, AZ (US);
Michel Fransois Hubert Klaassen, Eindhoven, NL;
Tammo Uitterdijk, De Bilt, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method for determining a polarization state of light passed through the projection lens of a lithographic apparatus is described. Polarizing structures are disposed on an object side of the projection lens of the lithographic apparatus. By measuring light that has passed through the polarizing structures information regarding the polarization characteristics of the projection lens can be determined.