The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2009
Filed:
Oct. 02, 2007
Akio Hasebe, Tokyo, JP;
Yasuhiro Motoyama, Tokyo, JP;
Yasunori Narizuka, Tokyo, JP;
Seigo Nakamura, Tokyo, JP;
Akio Hasebe, Tokyo, JP;
Yasuhiro Motoyama, Tokyo, JP;
Yasunori Narizuka, Tokyo, JP;
Seigo Nakamura, Tokyo, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
A technique of manufacturing a semiconductor integrated circuit device is provided for reducing the possibility of attachment of foreign matter to a membrane probe when performing probe inspection using the membrane probe formed by the manufacturing technique. A pressing member for pressing a membrane sheet includes a pressing pin receiving portion relatively disposed above for receiving the tip of a pressing pin of the plunger in a recess, and a membrane sheet pressing portion relatively disposed below. The membrane sheet pressing portion in contact with the membrane sheet has the minimum plane size to enable pressing of the entire surface of one chip of interest to be subjected to the probe inspection.