The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2009
Filed:
Jun. 07, 2006
Teruo Shoji, Tokyo, JP;
Akio Hasebe, Tokyo, JP;
Yoshinori Deguchi, Tokyo, JP;
Motoji Murakami, Tokyo, JP;
Masayoshi Okamoto, Hitachinaka, JP;
Yasunori Narizuka, Tokyo, JP;
Susumu Kasukabe, Tokyo, JP;
Teruo Shoji, Tokyo, JP;
Akio Hasebe, Tokyo, JP;
Yoshinori Deguchi, Tokyo, JP;
Motoji Murakami, Tokyo, JP;
Masayoshi Okamoto, Hitachinaka, JP;
Yasunori Narizuka, Tokyo, JP;
Susumu Kasukabe, Tokyo, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
By using a membrane probe formed by using a manufacturing technique for semiconductor integrated circuit devices, the yield of probing collectively performed on a plurality of chips is to be enhanced. A probe card is formed by using a plurality of pushers, each pusher being formed of a POGO pin insulator, POGO pins, an FPC connector, a membrane probe HMS, an impact easing sheet, an impact easing plate, a chip condenser YRS and so on, wherein one or two POGO pins press a plurality of metal films arranged like islands. One or more cuts are made into what matches the chip to be tested in the area of the membrane probe in a direction substantially parallel to the extending direction of wiring electrically connected to probes formed in the membrane probe.