The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Nov. 16, 2006
Steven W. Meeks, Fremont, CA (US);
Rusmin Kudinar, Fremont, CA (US);
William R. Wheeler, Saratoga, CA (US);
Hung Phi Nguyen, Santa Clara, CA (US);
Vamsi Velidandla, San Jose, CA (US);
Anoop Somanchi, Fremont, CA (US);
Ronny Soetarman, Fremont, CA (US);
Steven W. Meeks, Fremont, CA (US);
Rusmin Kudinar, Fremont, CA (US);
William R. Wheeler, Saratoga, CA (US);
Hung Phi Nguyen, Santa Clara, CA (US);
Vamsi Velidandla, San Jose, CA (US);
Anoop Somanchi, Fremont, CA (US);
Ronny Soetarman, Fremont, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a radial motor to move an optical head in a radial direction to detect defects at locations displaced from the edge of the wafer, and a rotational motor to rotate the optical head around the edge of the wafer to detect defects on the edge of the wafer.