The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Oct. 22, 2004
Jeroen Johannes Sophia Maria Mertens, Duizel, NL;
Aschwin Lodewijk Hendricus Johannes Van Meer, Roosendaal, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Edwin Van Gompel, Valkenswaard, NL;
Jeroen Johannes Sophia Maria Mertens, Duizel, NL;
Aschwin Lodewijk Hendricus Johannes Van Meer, Roosendaal, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Edwin Van Gompel, Valkenswaard, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An apparatus includes a support table for supporting a substrate. The support table includes a plurality of support protrusions that contact the substrate during use for supporting the substrate. The support table includes a plurality of heat transfer protrusions that extend towards the substrate during use without contacting the substrate when the substrate is supported by the support protrusions. Gas-containing heat exchanging gaps for exchanging heat with the substrate extend between the heat transfer protrusions and the substrate.