The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Sep. 29, 2006
William F. Divergilio, Brookline, MA (US);
Daniel R. Tieger, Manchester, MA (US);
William P. Reynolds, Canton, MA (US);
Christopher W. Hodgdon, East Kingston, NH (US);
Sean Joyce, Stoneham, MA (US);
William F. DiVergilio, Brookline, MA (US);
Daniel R. Tieger, Manchester, MA (US);
William P. Reynolds, Canton, MA (US);
Christopher W. Hodgdon, East Kingston, NH (US);
Sean Joyce, Stoneham, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
A deposit cleaning system for removing deposits from interior surfaces of ion sources and/or electrodes includes a fluorine source, a throttle mechanism, and a controller. The fluorine source supplies fluorine to the ion source as a cleaning material. The throttle mechanism mitigates loss of fluorine through a source aperture of the ion source by at least partially covering the source aperture. The controller controls the supply and flow rate from the fluorine source to the ion source and also controls the positioning of the throttle mechanism.