The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Sep. 29, 2006
Applicants:
Deodatta Vinayak Shenai-khatkhate, Danvers, MA (US);
Qing Min Wang, North Andover, MA (US);
Inventors:
Deodatta Vinayak Shenai-Khatkhate, Danvers, MA (US);
Qing Min Wang, North Andover, MA (US);
Assignee:
Rohm and Haas Electronics Materials LLP, Marlborough, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); C23C 16/00 (2006.01); C07F 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Organometallic compounds containing an electron donating group-substituted alkenyl ligand are provided. Such compounds are particularly suitable for use as vapor deposition precursors. Also provided are methods of depositing thin films, such as by ALD and CVD, using such compounds.