The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Oct. 27, 2006
Applicants:
Katsuhiro Kobayashi, Joetsu, JP;
Youichi Ohsawa, Joetsu, JP;
Takeshi Kinsho, Joetsu, JP;
Takeru Watanabe, Joetsu, JP;
Inventors:
Katsuhiro Kobayashi, Joetsu, JP;
Youichi Ohsawa, Joetsu, JP;
Takeshi Kinsho, Joetsu, JP;
Takeru Watanabe, Joetsu, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03C 1/73 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01); C07C 303/32 (2006.01);
U.S. Cl.
CPC ...
Abstract
Sulfonate salts have the formula:RSO—CH(Rf)—CFSOMwherein Ris alkyl or aryl, Rf is H or trifluoromethyl, and Mis a Li, Na, K, ammonium or tetramethylammonium ion. Onium salts, oximesulfonates and sulfonyloxyimides and other compounds derived from these sulfonate salts are effective photoacid generators in chemically amplified resist compositions.