The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2009
Filed:
Dec. 06, 2006
Vladimir Vitalevitch Ivanov, Moscow, RU;
Vadim Yevgenyevich Banine, Helmond, NL;
Konstantin Nikolaevitch Koshelev, Troitsk, RU;
Vladimir Mihailovitch Krivtsun, Troitsk, RU;
Vladimir Vitalevitch Ivanov, Moscow, RU;
Vadim Yevgenyevich Banine, Helmond, NL;
Konstantin Nikolaevitch Koshelev, Troitsk, RU;
Vladimir Mihailovitch Krivtsun, Troitsk, RU;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source is disclosed that includes an anode and a cathode that are configured and arranged to create a discharge in a substance in a discharge space between the anode and the cathode and to form a plasma so as to generate electromagnetic radiation, the anode and the cathode being rotatably mounted around an axis of rotation, the cathode being arranged to hold a liquid metal. The radiation source further includes an activation source arranged to direct an energy beam onto the liquid metal so as to vaporize part of the liquid metal and a liquid metal provider arranged to supply additional liquid metal so as to compensate for the vaporized part of the liquid metal.