The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2009
Filed:
Apr. 30, 2007
Jui-fang Chen, Taichung County, TW;
Cheng-hung Chang, Hsinchu, TW;
Chung-jung Chen, Hsinchu, TW;
Chih-ming Yang, Taipei County, TW;
Chien-kuo Ko, Hsinchu, TW;
Jui-Fang Chen, Taichung County, TW;
Cheng-Hung Chang, Hsinchu, TW;
Chung-Jung Chen, Hsinchu, TW;
Chih-Ming Yang, Taipei County, TW;
Chien-Kuo Ko, Hsinchu, TW;
United Microelectronics Corp., Hsinchu, TW;
Abstract
An ion beam blocking component suitable for blocking an ion beam generated by an ion source of an ion implanter is provided. The blocking component includes a front plate, a back plate, and a plurality of side plates. The front plate has at least one opening. The back plate is behind the front plate, and has a plurality of grooves formed on one surface thereof facing the front plate. The side plates are connected between the front plate and the back plate, and a receiving space is formed between these plates.