The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2009
Filed:
Nov. 14, 2005
Joerg Schultz, Aalen, DE;
Markus Deguenther, Aalen, DE;
Markus Brotsack, Aalen, DE;
Gerhard Fuerter, Ellwangen, DE;
Wolfgang Singer, Aalen, DE;
Manfred Maul, Aalen, DE;
Alexander Kohl, Aalen, DE;
Damian Fiolka, Oberkochen, DE;
Joerg Schultz, Aalen, DE;
Markus Deguenther, Aalen, DE;
Markus Brotsack, Aalen, DE;
Gerhard Fuerter, Ellwangen, DE;
Wolfgang Singer, Aalen, DE;
Manfred Maul, Aalen, DE;
Alexander Kohl, Aalen, DE;
Damian Fiolka, Oberkochen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
An optical beam transformation system has a sequence of optical elements arranged along an optical axis of the optical beam transformation system and designed for transforming an entrance light distribution striking an entrance surface of the optical beam transformation system into an exit light distribution emerging from an exit surface of the optical beam transformation system by radial redistribution of light intensity. The optical elements include a transformation element causing a radial redistribution of light intensity and having a transformation surface inclined to the optical axis and causing a polarization-selective reflection of a light distribution incident on the transformation surface according to an efficiency symmetry characteristic for the transformation surface. The optical elements further include an optical compensation element effecting a spatially dependent compensation of transmission inhomogeneties caused by the polarization-selective reflection at the transformation surface according to a compensation symmetry adapted to the efficiency symmetry of the transformation surface.