The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2009
Filed:
Feb. 06, 2008
Hans-juergen Mann, Oberkochen, DE;
Wilhelm Ulrich, Aalen-Dewangen, DE;
Guenther Seitz, Spiegelberg, DE;
Hans-Juergen Mann, Oberkochen, DE;
Wilhelm Ulrich, Aalen-Dewangen, DE;
Guenther Seitz, Spiegelberg, DE;
Carl-Zeiss SMT AG, Oberkochen, DE;
Abstract
A projection objective provides a light path for a light bundle from an object field in an object plane to an image field in an image plane. The projection objective includes a first mirror (S), a second mirror (S), a third mirror (S), a fourth mirror (S), a fifth mirror (S), a sixth mirror (S), a seventh mirror (S), and an eighth mirror (S). The light bundles includes light with a wavelength in a range of 10-30 nm. The light is provided via the eight mirrors, and in the light path exactly one intermediate image of the object field is provided.