The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2009
Filed:
Jan. 05, 2007
Applicants:
Takashi Fuse, Nirasaki, JP;
Kiwamu Fujimoto, Nirasaki, JP;
Tomoyo Yamaguchi, Nirasaki, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
An object to be process has a structure having an SiC filmand an organic Si-low dielectric constant filmformed on the SiC film. The SiC filmis etched using a plasma produced from an etching gas and using the organic Si low-dielectric constant filmas a mask. The etching gas contains CHFor CHF.