The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2009
Filed:
May. 17, 2005
Harald F. Hess, La Jolla, CA (US);
Thomas Daniel Carr, Encinitas, CA (US);
Romain Sappey, San Diego, CA (US);
Harald F. Hess, La Jolla, CA (US);
Thomas Daniel Carr, Encinitas, CA (US);
Romain Sappey, San Diego, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
In one embodiment, a method of dynamic reference plane compensation, comprises impinging radiation from a first radiation source onto a surface of an object; generating an uncompensated measurement signal from radiation reflected from a first location on the surface and a second location; generating a compensation signal from radiation reflected from a third location and a fourth location on the surface; and generating a compensated measurement signal using the uncompensated measurement signal and the compensation signal.