The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2009
Filed:
Oct. 12, 2004
Applicant:
Chen-hsiung Yang, Taipei Hsien, TW;
Inventor:
Chen-Hsiung Yang, Taipei Hsien, TW;
Assignee:
Touch Micro-System Technology Inc., Yang-Mei, Taoyuan Hsien, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
Abstract
A wafer carrier for carrying a wafer includes a transparent base and a conducting layer. The transparent base has dimensions similar to that of the wafer, and bonds the wafer with a bonding layer. The conducting layer is transparent, and can be attracted by an electrostatic chuck so that the electrostatic chuck can deliver the wafer.