The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2009
Filed:
Jan. 19, 2007
Ichiro Tachibana, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Atsuko Fukada, Kokubunji, JP;
Naomasa Suzuki, Hitachinaka, JP;
Muneyuki Fukuda, Kokubunji, JP;
Ichiro Tachibana, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Atsuko Fukada, Kokubunji, JP;
Naomasa Suzuki, Hitachinaka, JP;
Muneyuki Fukuda, Kokubunji, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A scanning electron microscope, by which an image of unevennesses on the surface of a sample may be obtained in a high-resolution manner and a high contrast one, is provided according to the present invention. A sample image is obtained by use of the scanning electron microscope with a configuration in which a positive voltage is applied in order to accelerate a primary electron beam, and an electric field shielding plate, a magnetic field shielding plate, or an electromagnetic field shielding plate is arranged on the upper side of an object lens.