The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2009
Filed:
Dec. 29, 2005
Johannes Hubertus Josephina Moors, Helmond, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Johannes Christiaan Leonardus Franken, Knegsel, NL;
Vladimir Vitalevitch Ivanov, Moscow, RU;
Konstantin Nikolaevitch Koshelev, Moscow, RU;
Alexander Matthijs Struycken, Eindhoven, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Johannes Christiaan Leonardus Franken, Knegsel, NL;
Vladimir Vitalevitch Ivanov, Moscow, RU;
Konstantin Nikolaevitch Koshelev, Moscow, RU;
Alexander Matthijs Struycken, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source generates short-wavelength radiation, such as extreme ultraviolet radiation, for use in lithography. Rotating electrodes are provided which dip into respective baths of liquid metal, for example, tin. An electrical discharge is produced between the electrodes to generate the radiation. Holes are provided in the electrodes and/or in a metal shielding plate around the electrodes to enable better pumping down to low pressure in the vicinity of the discharge to improve the conversion efficiency of the source. The holes in the electrodes improve cooling of the electrodes by causing stirring of the liquid metal, and by improving the thermal and electrical contact between the electrodes and the liquid metal. Improved electrical contact also reduces the time-constant of the discharge circuit, thereby further improving the conversion efficiency of the source.