The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2009
Filed:
Jun. 26, 2006
Yukihiro Shibata, Kanagawa-ken, JP;
Shunji Maeda, Kanagawa-ken, JP;
Kazuo Yamaguchi, Kanagawa-ken, JP;
Minoru Yoshida, Kanagawa-ken, JP;
Atsushi Yoshida, Kanagawa-ken, JP;
Kenji Oka, Kanagawa-ken, JP;
Kenji Watanabe, Tokyo, JP;
Yukihiro Shibata, Kanagawa-ken, JP;
Shunji Maeda, Kanagawa-ken, JP;
Kazuo Yamaguchi, Kanagawa-ken, JP;
Minoru Yoshida, Kanagawa-ken, JP;
Atsushi Yoshida, Kanagawa-ken, JP;
Kenji Oka, Kanagawa-ken, JP;
Kenji Watanabe, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the optical image of the reflected light obtained therefrom. Also included is a display for displaying the optical image detected by this lighting and detecting apparatus; an optical parameter setting device for setting and displaying optical parameters for the lighting and detecting apparatus on the display; and optical parameter adjusting apparatus for adjusting optical parameters set for the lighting and detecting apparatus according to the optical parameters set by the optical parameter setting apparatus; a storage device for storing comparative image data; and a defect detecting device for detecting defects from patterns formed on the sample by comparing the optical image detected by the optical image detecting apparatus with the comparative image data stored in the storage.