The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2009
Filed:
May. 29, 2001
Applicants:
Bernard Aspar, Rives, FR;
Chrystelle Lagahe, St-Laurent-du-Pont, FR;
Olivier Rayssac, Grenoble, FR;
Bruno Ghyselen, Seyssinet, FR;
Inventors:
Bernard Aspar, Rives, FR;
Chrystelle Lagahe, St-Laurent-du-Pont, FR;
Olivier Rayssac, Grenoble, FR;
Bruno Ghyselen, Seyssinet, FR;
Assignee:
Commissariat A l'Energie Atomique, Paris, FR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
This invention relates to a substrate () weakened by the presence of a micro-cavities zone, the micro-cavities zone () delimiting a thin layer () with one face () of the substrate (), some or all of the gaseous species having been eliminated from the micro-cavities (). The invention also relates to a process for the production of such a substrate.