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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7497938 B1

PDFFull Text
Expired
Date of Patent:
Mar. 03, 2009

Filed:

Mar. 22, 2005

Tribo-chronoamperometry as a tool for cmp application

Applicants:

Jian Zhang, Aurora, IL (US);

Steven K. Grumbine, Aurora, IL (US);

Phillip W. Carter, Naperville, IL (US);

Inventors:

Jian Zhang, Aurora, IL (US);

Steven K. Grumbine, Aurora, IL (US);

Phillip W. Carter, Naperville, IL (US);

Assignee:

Cabot Microelectronics Corporation, Aurora, IL (US);

Attorneys:

Thomas E. Omholt

Francis J. Koszyk

Steven D. Weseman

Primary Examiner:

Bruce F Bell

Int. Cl.
CPC ...
B23H 3/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention provides a method of determining at least one electrochemical characteristic of a chemical-mechanical or electrochemical-mechanical polishing system comprising application of a potential between a polishing substrate and an electrode to generate a current, and determining the at least one electrochemical characteristic by analysis of the current as a function of time.

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Zhang, Jian. (2009). Tribo-chronoamperometry as a tool for cmp application (U.S. Patent No. 7497938). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7497938

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