The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2009
Filed:
Oct. 18, 2007
Applicants:
Masanobu Ezaki, Hadano, JP;
Masashi Kobata, Hadano, JP;
Sachiko Kato, Hadano, JP;
Inventors:
Assignee:
Covalent Materials Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 3/06 (2006.01); C03C 3/076 (2006.01); C03B 20/00 (2006.01); C03B 32/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
To provide titania-silica glass which is transparent glass of low thermal expansion, in particular, is of a low thermal expansion coefficient over a wide range of temperatures of 0 to 100° C. (an operating temperature range) when it is used as a photomask or a mirror material in extreme ultraviolet ray lithography, and which is excellent in homogeneity within the field and stability. Titania-silica glass is used which has 8 to 10% by weight of titania and 90 to 92% by weight of silica, where a Ticoncentration is 10 to 60 ppm by weight.