The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
Jan. 27, 2005
Kei Hayasaki, Kamakura, JP;
Toru Mikami, Fujisawa, JP;
Shinichi Ito, Yokohama, JP;
Yuichiro Yamazaki, Tokyo, JP;
Toshiya Kotani, Machida, JP;
Kei Hayasaki, Kamakura, JP;
Toru Mikami, Fujisawa, JP;
Shinichi Ito, Yokohama, JP;
Yuichiro Yamazaki, Tokyo, JP;
Toshiya Kotani, Machida, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
Wavelength dispersion of intensity of light reflected from an evaluation object is measured. A complex refractive index of a substance forming the evaluation object and the environment are prepared. Virtual component ratios comprising a mixture ratio of the substances forming the evaluation object and the environment are prepared. Reflectance wavelength dispersions to the virtual component ratios are calculated. Similar reflectance wavelength dispersions having a small difference with the measured wavelength dispersion are extracted from the reflectance wavelength dispersions. Weighted average to the virtual component ratios used for calculating the similar reflectance wavelength dispersions are calculated to obtain a component ratio of the substance forming the evaluation object and the environment so that weighting is larger when the difference is smaller. A structure of the evaluation object is determined from the calculated component ratio.