The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
Mar. 27, 2006
Applicants:
Boris Yokhin, Nazareth Illit, IL;
Isaac Mazor, Haifa, IL;
Sean Jameson, Austin, TX (US);
Alex Dikopoltsev, Haifa, IL;
Inventors:
Boris Yokhin, Nazareth Illit, IL;
Isaac Mazor, Haifa, IL;
Sean Jameson, Austin, TX (US);
Alex Dikopoltsev, Haifa, IL;
Assignee:
Jordan Valley Applied Radiation Ltd., Migdal Ha'emek, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 18/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for inspection includes directing a beam of X-rays to impinge upon an area of a sample containing first and second features formed respectively in first and second thin film layers, which are overlaid on a surface of the sample. A pattern of the X-rays diffracted from the first and second features is detected and analyzed in order to assess an alignment of the first and second features.