The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2009
Filed:
Dec. 28, 2005
Applicants:
Edward Ratner, Sunnyvale, CA (US);
Andrei Veldman, Issaquah, WA (US);
Daniel Wack, Los Altos, CA (US);
Inventors:
Edward Ratner, Sunnyvale, CA (US);
Andrei Veldman, Issaquah, WA (US);
Daniel Wack, Los Altos, CA (US);
Assignee:
KLA-Tencor Corporation, San Jose, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/28 (2006.01); G01J 4/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
In an embodiment, a method of time-domain simulation for simulating scattering spectra is described. The method may provide for computing spatial derivatives including computing spectral derivatives in some portion of the domain and finite difference derivatives in some other portion of the domain; forming an equation for non-reflecting boundary conditions; and computing a time-stepping scheme using a high-order unconditionally stable computation method.