The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2009
Filed:
Feb. 16, 2005
James E. Willis, Austin, TX (US);
Merritt Funk, Austin, TX (US);
Kevin Lally, Austin, TX (US);
Kevin Pinto, Austin, TX (US);
Masayuki Tomoyasu, Nirasaki, JP;
Raymond Peterson, Manor, TX (US);
Radha Sundararajan, Dripping Springs, TX (US);
James E. Willis, Austin, TX (US);
Merritt Funk, Austin, TX (US);
Kevin Lally, Austin, TX (US);
Kevin Pinto, Austin, TX (US);
Masayuki Tomoyasu, Nirasaki, JP;
Raymond Peterson, Manor, TX (US);
Radha Sundararajan, Dripping Springs, TX (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method for implementing FDC in an APC system including receiving an FDC model from memory; providing the FDC model to a process model calculation engine; computing a vector of predicted dependent process parameters using the process model calculation engine; receiving a process recipe comprising a set of recipe parameters, providing the process recipe to a process module; executing the process recipe to produce a vector of measured dependent process parameters; calculating a difference between the vector of predicted dependent process parameters and the vector of measured dependent process parameters; comparing the difference to a threshold value; and declaring a fault condition when the difference is greater than the threshold value.