The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2009
Filed:
Mar. 07, 2006
Kai-yu Cheng, Hsinchu, TW;
Yen-liang Chen, Hsinchu, TW;
Hsiang-han Hsu, Hsinchu, TW;
Yi-ching Chen, Hsinchu, TW;
Yu-ping Lan, Hsinchu, TW;
Kai-Yu Cheng, Hsinchu, TW;
Yen-Liang Chen, Hsinchu, TW;
Hsiang-Han Hsu, Hsinchu, TW;
Yi-Ching Chen, Hsinchu, TW;
Yu-Ping Lan, Hsinchu, TW;
Industrial Technology Research Institute, Chutung, Hsinchu, TW;
Abstract
A system and a method for thickness measurement that comprises providing a first confocal microscope, emitting a first light beam from the first confocal microscope in a first direction, focusing the first beam at a first focal plane, providing a second confocal microscope, emitting a second light beam from the second confocal microscope in a second direction substantially opposed to the first direction, focusing the second beam at a second focal plane, and adjusting the relative position of the first and second microscopes by overlapping the first and second focal planes.