The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2009
Filed:
Jan. 12, 2006
Kaushik Chanda, Fishkill, NY (US);
James J. Demarest, Fishkill, NY (US);
Ronald G. Filippi, Wappingers Falls, NY (US);
Roy C. Iggulden, Stoughton, MA (US);
Edward W. Kiewra, Verbank, NY (US);
Vincent J. Mcgahay, Poughkeepsie, NY (US);
Ping-chuan Wang, Hopewell Junction, NY (US);
Yun-yu Wang, Poughquag, NY (US);
Kaushik Chanda, Fishkill, NY (US);
James J. Demarest, Fishkill, NY (US);
Ronald G. Filippi, Wappingers Falls, NY (US);
Roy C. Iggulden, Stoughton, MA (US);
Edward W. Kiewra, Verbank, NY (US);
Vincent J. McGahay, Poughkeepsie, NY (US);
Ping-Chuan Wang, Hopewell Junction, NY (US);
Yun-Yu Wang, Poughquag, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
In the back end of an integrated circuit employing dual-damascene interconnects, the interconnect members have a first non-conformal liner that has a thicker portion at the top of the trench level of the interconnect; and a conformal second liner that combines with the first liner to block diffusion of the metal fill material.