The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2008
Filed:
Sep. 22, 2005
Franz Sorg, Aalen, DE;
Andreas Wurmbrand, Aalen-Reichenbach, DE;
Thomas Petasch, Aalen, DE;
Dirk Schaffer, Aalen, DE;
Siegfried Wahl, Donzdorf, DE;
Franz Sorg, Aalen, DE;
Andreas Wurmbrand, Aalen-Reichenbach, DE;
Thomas Petasch, Aalen, DE;
Dirk Schaffer, Aalen, DE;
Siegfried Wahl, Donzdorf, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount (). The optical element is connected to the mount () at least partly via an adhesive connection. This is located between the adjacent circumferential walls of mount () and optical element. The mount () is provided with at least three support feet () distributed over the circumference, by means of which the optical element is mounted laterally and axially. The mount () is connected to the housing of the objective in an at least approximately deformation-decoupled manner via three mount bearing points ().