The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2008
Filed:
Feb. 14, 2006
Jozef Maria Finders, Veldhoven, NL;
Luis Alberto Colina Santamaria Colina, Veldhoven, NL;
Steven George Hansen, Phoenix, AZ (US);
Jozef Maria Finders, Veldhoven, NL;
Luis Alberto Colina Santamaria Colina, Veldhoven, NL;
Steven George Hansen, Phoenix, AZ (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method for configuring the optical transfer of a patterning device pattern onto a substrate with a lithographic apparatus is presented. The method includes adjusting an intensity of a first illumination shape relative to a second illumination shape, the first and the second illumination shapes defining respectively a first illumination area and a second illumination area within a pupil plane of an illumination system of the lithographic apparatus, while maintaining the first and second illumination areas substantially constant, and illuminating the patterning device pattern with the first and second illumination shapes.