The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2008
Filed:
Mar. 01, 2007
Ramanan Chebiam, Hillsboro, OR (US);
Chin-chang Cheng, Portland, OR (US);
Damian Whitney, Hillsboro, OR (US);
Harsono Simka, Saratoga, CA (US);
Ramanan Chebiam, Hillsboro, OR (US);
Chin-Chang Cheng, Portland, OR (US);
Damian Whitney, Hillsboro, OR (US);
Harsono Simka, Saratoga, CA (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
In one embodiment, the present invention includes a method for depositing a barrier layer on a substrate having a trench, depositing a liner layer on the barrier layer that includes a surface oxide, electrolessly depositing a copper seed layer on the liner layer, where the surface oxide is reduced in-situ in an electroless bath, depositing a bulk metal layer on the copper seed layer. Other embodiments are described and claimed.