The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2008
Filed:
Jan. 25, 2006
Steven R. Rogers, Emek Sorek, IL;
Nissim Elmaliach, Raanana, IL;
Emanuel Elyasef, Rehovot, IL;
Alon Litman, Nes Ziona, IL;
Ron Naftali, Shoham, IL (US);
Doron Meshulach, Ramat-Gan, IL;
Steven R. Rogers, Emek Sorek, IL;
Nissim Elmaliach, Raanana, IL;
Emanuel Elyasef, Rehovot, IL;
Alon Litman, Nes Ziona, IL;
Ron Naftali, Shoham, IL (US);
Doron Meshulach, Ramat-Gan, IL;
Applied Materials, Israel, Ltd., Rehovot, IL;
Abstract
A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.