The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2008

Filed:

Oct. 31, 2006
Applicants:

Blaine D. Johs, Lincoln, NE (US);

Steven E. Green, Lincoln, NE (US);

Craig M. Herzinger, Lincoln, NE (US);

Duane E. Meyer, Lincoln, NE (US);

Inventors:

Blaine D. Johs, Lincoln, NE (US);

Steven E. Green, Lincoln, NE (US);

Craig M. Herzinger, Lincoln, NE (US);

Duane E. Meyer, Lincoln, NE (US);

Assignee:

J.A. Woollam Co., Inc., Lincoln, NE (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01); G02B 5/30 (2006.01);
U.S. Cl.
CPC ...
Abstract

A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.


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