The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2008
Filed:
Nov. 29, 2006
Shunji Maeda, Yokohama, JP;
Yasuhiko Nakayama, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Hitoshi Kubota, Fujisawa, JP;
Kenji Oka, Fujisawa, JP;
Shunji Maeda, Yokohama, JP;
Yasuhiko Nakayama, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Hitoshi Kubota, Fujisawa, JP;
Kenji Oka, Fujisawa, JP;
Renesas Technology Corporation, Tokyo, JP;
Abstract
A method of inspecting a specimen, including: emitting a light from a lamp of a light source; illuminating a specimen on which plural patterns are formed with the light emitted from the light source and, passed through an objective lens; forming an optical image of the specimen by collecting light reflected from the specimen by the illuminating and passed through the objective lens and a image forming lens; detecting the optical image with a TDI image sensor; and processing a signal outputted from the TDI image sensor and detecting a defect of a pattern among the plural patterns formed on the specimen, wherein the image detected by the TDI image sensor is formed with light having a wavelength selected from the wavelengths of the light emitted from the light source.