The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2008
Filed:
Feb. 18, 2005
Applicants:
Arno Jan Bleeker, Westerhoven, NL;
Dominicus Jacobus Petrus Adrianus Franken, Veldhoven, NL;
Martinus Hendricus Hendricus Hoeks, Breugel, NL;
Lambertus Gerardus Maria Kessels, Aalst-Waalre, NL;
Tobrjörn Sandström, Pixbo, SE;
Inventors:
Arno Jan Bleeker, Westerhoven, NL;
Dominicus Jacobus Petrus Adrianus Franken, Veldhoven, NL;
Martinus Hendricus Hendricus Hoeks, Breugel, NL;
Lambertus Gerardus Maria Kessels, Aalst-Waalre, NL;
Tobrjörn Sandström, Pixbo, SE;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G02B 26/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A lithographic apparatus provided with an array of individually controllable elements that is detachably mounted to mounting points on a support frame of the lithographic apparatus.