The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2008
Filed:
Oct. 19, 2006
Mine Araki, Hitachinaka, JP;
Shunya Watanabe, Hitachinaka, JP;
Chisato Kamiya, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Atsushi Takane, Mito, JP;
Akinari Morikawa, Hitachinaka, JP;
Atsushi Miyaki, Hitachinaka, JP;
Toru Ishitani, Hitachinaka, JP;
Mine Araki, Hitachinaka, JP;
Shunya Watanabe, Hitachinaka, JP;
Chisato Kamiya, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Atsushi Takane, Mito, JP;
Akinari Morikawa, Hitachinaka, JP;
Atsushi Miyaki, Hitachinaka, JP;
Toru Ishitani, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.