The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2008
Filed:
Sep. 16, 2005
Hiroki Hosaka, Nirasaki, JP;
Toshihiko Iijima, Nirasaki, JP;
Shinya Shimizu, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In a substrate transfer apparatus, an adaptor unitincludes a box-shaped main bodyhaving three open sides; and a plurality of stage armsdisposed in the main body, serving as substrate mounting members. Each of the stage armshas a disc-shaped wafer supporting portiondisposed at an approximately central portion of the main bodyand a flat bodydisposed in the main bodyso as not to interfere with the moving paths of transfer armsand. Formed at a connecting portion of the wafer supporting portionand the bodyare cutout portionsfor preventing interference between the stage armsand two prongs of leading end portions of the transfer armsandintroduced into the main body