The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2008
Filed:
Apr. 05, 2005
Henrikus Herman Marie Cox, Eindhoven, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A positioning device for positioning an object table includes a frame for supporting the object table in a first direction and a motor constructed and arranged to exert a first force on the object table in a second direction substantially perpendicular to the first direction and a second force on the object table in a third direction substantially perpendicular to the first direction and the second direction. A first part of the motor is constructed and arranged to co-operate with a second part for generating the first and second force. The first part is arranged on the object table, such that both the first force and the second force are directed substantially through the center of gravity of the object table.