Scanning probe microscope and scanning method

Abstract

A scanning probe microscope has a probe needle and a control section that controls relative scanning movement between the probe needle and a surface of a sample in at least one direction parallel to the sample surface and controls relative movement between the probe needle and the sample surface in a direction perpendicular to the sample surface. A vibration source vibrates the probe needle at a vibrating frequency relative to the sample surface. An approach/separation drive section causes the probe needle to relatively approach to and separate from the sample surface at a predetermined distance while the probe needle is vibrated at the vibrating frequency relative to the sample surface by the vibration source. A detection section detects a rate of change in a vibration state of the probe needle in accordance with a distance between the probe needle and the sample surface. An observation section gathers observation data from the sample surface when the rate of change in the vibration state of the probe needle detected by the detection section has exceeded a preselected threshold value.