The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7456371 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 25, 2008

Filed:

May. 03, 2004
Applicants:

Kenji Kasahara, Tsukuba, JP;

Ritsuko Kawasaki, Machida, JP;

Hisashi Ohtani, Tochigi, JP;

Koichiro Tanaka, Atsugi, JP;

Inventors:

Kenji Kasahara, Tsukuba, JP;

Ritsuko Kawasaki, Machida, JP;

Hisashi Ohtani, Tochigi, JP;

Koichiro Tanaka, Atsugi, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/06 (2006.01); H01L 21/20 (2006.01); H01L 21/36 (2006.01); G02B 27/10 (2006.01); G02B 27/14 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention provides a laser apparatus including a transmission-variable mirror and a method for forming a semiconductor device using the apparatus. For crystallizing an amorphous semiconductor film by irradiation of laser beams, a top surface and a back surface of the amorphous semiconductor film are irradiated with the laser beams. In this case, the transmission-variable mirror is used for dividing a laser light emitted from a laser source.


Find Patent Forward Citations

Kasahara, Kenji. (2008). Laser apparatus and laser annealing method (U.S. Patent No. 7456371). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7456371

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