The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
Feb. 02, 2006
Jörg Schultz, Aalen, DE;
Johannes Wangler, Königsbronn, DE;
Karl-heinz Schuster, Königsbronn, DE;
Udo Dinger, Oberkochen, DE;
Wolfgang Singer, Aalen, DE;
Martin Antoni, Aalen, DE;
Joachim Wietzorrek, Aalen, DE;
Joachim Hainz, Aalen, DE;
Jörg Schultz, Aalen, DE;
Johannes Wangler, Königsbronn, DE;
Karl-Heinz Schuster, Königsbronn, DE;
Udo Dinger, Oberkochen, DE;
Wolfgang Singer, Aalen, DE;
Martin Antoni, Aalen, DE;
Joachim Wietzorrek, Aalen, DE;
Joachim Hainz, Aalen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
There is provided an illumination system. the illumination system includes (a) a source of light having a wavelength of less than or equal to 193 nm, and (b) an optical element in a path of the light, having a first raster element, a second raster element, a third raster element and a fourth raster element situated thereon. The second raster element is adjacent to the first raster element, and located a first distance from the first raster element. The fourth raster element is adjacent to the third raster element, and located a second distance from the third raster element. The second distance is different from the first distance.