The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
Mar. 31, 2004
John M. DE Larios, Palo Alto, CA (US);
Aleksander Owczarz, San Jose, CA (US);
Alan Schoepp, Ben Lomond, CA (US);
Fritz Redeker, Fremont, CA (US);
John M. de Larios, Palo Alto, CA (US);
Aleksander Owczarz, San Jose, CA (US);
Alan Schoepp, Ben Lomond, CA (US);
Fritz Redeker, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
An apparatus for use in processing a substrate includes a brush enclosure extending over a length. The brush enclosure is configured to be disposed over a surface of the substrate and has an open region that is configured to be disposed in proximity to the substrate. The open region extends over the length of the brush enclosure and enables foam from within the brush enclosure to contact the surface of the substrate. A substrate cleaning system and method for cleaning a substrate are also described.