The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2008
Filed:
May. 19, 2006
BO H. Vanderberg, Gloucester, MA (US);
Victor M. Beneviste, Gloucester, MA (US);
John F. Fallon, Beverly, MA (US);
Ilya Pokidov, Allston, MA (US);
Bo H. Vanderberg, Gloucester, MA (US);
Victor M. Beneviste, Gloucester, MA (US);
John F. Fallon, Beverly, MA (US);
Ilya Pokidov, Allston, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
An exemplary ion source for creating a stream of ions has an aluminum alloy arc chamber body that at least partially bounds an ionization region of the arc chamber. The arc chamber body is used with a hot filament arc chamber housing that either directly or indirectly heats a cathode to sufficient temperature to cause electrons to stream through the ionization region of the arc chamber. A temperature sensor monitors temperatures within the arc chamber and provides a signal related to sensed temperature. A controller monitors sensed temperature as measured by the sensor and adjusts the temperature to maintain the sensed temperature within a range.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile