The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2008
Filed:
Dec. 22, 2004
Makoto Nakajima, Minami-alps, JP;
Takanori Saito, Kai, JP;
Tsuyoshi Takizawa, Hokota, JP;
Manabu Honma, Kai, JP;
Makoto Nakajima, Minami-alps, JP;
Takanori Saito, Kai, JP;
Tsuyoshi Takizawa, Hokota, JP;
Manabu Honma, Kai, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A vertical heat processing apparatus includes a process chamber () defining a process field (A) configured to accommodate a plurality of target substrates (W) supported at intervals in a vertical direction. The apparatus further includes a heating furnace () surrounding the process chamber () and including an electric heater (), and an electric blower () configured to send a cooling gas into the heating furnace (). A control section () executes, in order to converge the process field (A) to a target temperature, performing power feeding to the heater () to heat up the process field (A) to a predetermined temperature immediately below the target temperature, and at a time point when the process field (A) reaches the predetermined temperature, decreasing the power feeding to the heater (), and supplying the cooling gas from the blower () to forcibly cool the process field (A).