The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2008
Filed:
Jul. 12, 2005
Yun-jung Jee, Gyeonggi-do, KR;
Chung-sam Jun, Gyeonggi-do, KR;
Yu-sin Yang, Seoul, KR;
Tae-kyoung Kim, Gyeonggi-do, KR;
Yun-Jung Jee, Gyeonggi-do, KR;
Chung-Sam Jun, Gyeonggi-do, KR;
Yu-Sin Yang, Seoul, KR;
Tae-Kyoung Kim, Gyeonggi-do, KR;
Samsung Electronic Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Abstract
In a method and apparatus for forming a three-dimensional image for an inspection pattern, a reference intensity function of an inspection X-ray is formed in accordance with a continuous scanning depth, and is differentiated with respect to the scanning depth. The differential reference intensity function is decomposed into a start function and a characteristic function. The differential reference intensity function is then repeatedly integrated while a temporary vertical profile function is substituted for the start function until the temporary intensity of a reference X-ray is within an allowable error range. The temporary vertical profile function satisfying the error range is selected as an optimal vertical profile function. A surface shape is combined to the optimal vertical profile function along a depth of the inspection pattern to thereby form the three-dimensional image for the inspection pattern.