The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2008
Filed:
Jan. 24, 2005
Timo Laufer, Aalen, DE;
Jean-noel Fehr, Pully, CH;
Harald Kirchner, Munich, DE;
Andreas Ochse, Oberkochen, DE;
Timo Laufer, Aalen, DE;
Jean-Noel Fehr, Pully, CH;
Harald Kirchner, Munich, DE;
Andreas Ochse, Oberkochen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
There is provided an optical component. The optical component includes a material having a surface that heats to a maximum temperature (T) when subjected to radiation. The material has a temperature-dependent coefficient of thermal expansion (α(T)) of about zero at a temperature Tthat is approximately equal to T. The optical component is suitable for use in any of an illumination system, a projection objective or a projection exposure system, as employed, for example, for EUV microlithography.